Large volume microwave plasma

As in earlier reported work (4), the present study has used a large-volume microwave plasma (IMP) facility. The choice is based on the favorable deposition kinetics at microwave frequencies, and on the relative ease of scaling experimental LMP apparatus to industrially useful size. 

In any preparation of polymer-filler composites, there is concern about the quality of adhesion at the filler/matrix interface, and consequently over the interaction between filler and molten polymer at the compounding stage. Various technologies have been proposed to enhance adhesion in our laboratories, we have developed surface treatment (encapsulation) techniques in which mica is exposed to a "cold" microwave plasma (l.e. Tgiectron Tgas "Large Volume Microwave Plasma Generator"(LMP)... 

Keebler, EE (1990), A Large Volume Microwave Plasma Facility for Plasma Ion Implantation Studies, M.S. 

Bosisio RG, Wertheimer MR, Weissfloch CF. Generation of large volume microwave plasmas. Journal of Physics, E Scientific Instruments 6 628-630, 1993. 

The use of high frequency plasmas for the surface modification of substrates, for etching processes and similar ends, is increasing rapidly. The wide ranging interest in plasma processes is reflected in our case by work involving a large volume microwave plasma apparatus,... 

Microwave discharges at pressures below 1 Pa witli low collision frequencies can be generated in tlie presence of a magnetic field B where tlie electrons rotate witli tlie electron cyclotron frequency. In a magnetic field of 875 G tlie rotational motion of tlie electrons is in resonance witli tlie microwaves of 2.45 GHz. In such low-pressure electron cyclotron resonance plasma sources collisions between tlie atoms, molecules and ions are reduced and the fonnation of unwanted particles in tlie plasma volume ( dusty plasma ) is largely avoided. 

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