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Ion Chromatography in the Semiconductor Industry

A key problem in the semiconductor industry is the lifetime of manufactured semiconductor components. Their durability is decisively affected by ionic contaminations caused by [Pg.651]

Insufficient quality of the water being used Incomplete rinsing processes Impurities in the chemicals being used Contaminations in the passivation layers Quality and type of polymers being used [Pg.651]

The complexity, speed of development, and diversification of this industry demand the use of the highest quality water, chemicals, and solvents. [Pg.651]

Ion chromatography offers an efficient method for analyzing ionic species for the production of semiconductor components and printed circuit boards. Conventional methods based on the SEMI (Semiconductor Equipment and Materials Institute, Inc.) regulations for identifying and quantifying ionic species responsible for corrosion are labor-intensive and time-consuming, whereas it is [Pg.651]

Water analysis Determination of mineral acids in high-purity water, process liquors, rinsing- and wastewater [Pg.652]

Vanatta LE (2001) Application of ion chromatography in the semiconductor industry. Trends in Analytical Chemistry 20 336-345. [Pg.2301]

Ion Chromatography in the Semiconductor Industry 11115 Table 10.17 Application areas and typical analytical examples in the semiconductor industry. [Pg.1115]

See other pages where Ion Chromatography in the Semiconductor Industry is mentioned: [Pg.303]    [Pg.1]    [Pg.382]    [Pg.383]    [Pg.385]    [Pg.2109]    [Pg.1114]    [Pg.1117]    [Pg.1119]    [Pg.1121]    [Pg.1123]    [Pg.1125]    [Pg.1127]    [Pg.1129]    [Pg.1131]    [Pg.1133]    [Pg.1135]    [Pg.1139]    [Pg.1141]    [Pg.1143]    [Pg.1145]    [Pg.1147]    [Pg.651]    [Pg.651]    [Pg.653]    [Pg.655]    [Pg.657]    [Pg.659]    [Pg.661]    [Pg.663]    [Pg.665]    [Pg.667]    [Pg.669]    [Pg.671]    [Pg.673]    [Pg.675]    [Pg.677]   


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Industrial chromatography

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