Integrated circuits, manufacture, unit processes

Although more than 100 individual process steps are used in the manufacture of even simple integrated circuits, the fabrication sequence invokes many of the same operations numerous times. A list of unit operations that compose the technological arsenal for the fabrication of solid-state materials and devices can be made. Clearly, these unit operations are distinctly different from those associated with traditional chemical manufacture. Nevertheless, the purpose of defining such a list is the same to establish the necessary chemical and physical operations so that a complicated process may be designed and carried out from individual, more easily controlled... 

The fabrication of integrated circuits can be divided in a series of individual unit processes utilized in the manufacturing process. To control these unit processes the fundamental physical and chemical phenomena need to be fully understood. The present technology for making integrated circuits is versatile, but much remains to be done to fully exploit some of the unit processes and to develop new processes to produce cheaper and electronically superior chips for future applications. 

The chapters in this volume present a cross section of some of the most important areas of study in the fabrication of integrated circuits. Many of the chapters are reviews, and the book gives an overview of many areas important in the manufacture of integrated circuits. Both experts and novices will find material in this text that will increase their knowledge of the phenomena occurring in the unit processes. 

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