Hybrid Sol-Gel Route for Ultrathin PZT

2 Aqueous Chemical Solution Deposition from Citrate Complex Precursors 

In our research, we have applied aqueous chemical solution deposition [38,39] to the screening of several candidate high-x dielectric materials such as Zr02, rare 

It was found that it is possible to obtain uniform, ultrathin, dielectric films down to 5 nm in thickness, by spin coating dilute solutions (0.01-0.075 M) and by applying a moderate number of layers (3 or 4). Typical dielectric constants were around 20 for most of the materials studied. The formation of interfacial silicates on Si substrates during high-temperature anneals (above 800 °C typically) with, for example, lanthanides and alkaline earth metal ions is held responsible for lowering of the effective dielectric constant of the 

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