High-resolution Rutherford backscattering HRBS

Similarly, a study of the anions [PFg] and [DCA] by high-resolution Rutherford backscattering (HRBS) also revealed that both cation and anions are at the surface, and the alkyl chains of both ion types point away from the surface into the vacuum phase. The experimental data initially showed hints toward carbon enrichment and nitrogen depletion at the uppermost surface layers that might indicate unequal distribution of cation and anion at the surface, but the signals were actually due to... 

Quantification in shallow profiles is another issue for quantitative analysis with SIMS. Matrix effects and sputtering rate changes are necessary considerations in quantification of shallow profiles to obtain an accurate profile with concentration and depth scales [14]. Comparison to high resolution Rutherford backscattering (HRBS) data helps in evaluating shallow SIMS profiles [36]. 

---

See also in sourсe #XX -- [ ]

---