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High mobility channel materials

CMP processing of high mobility channel materials alternatives to Si... [Pg.119]

CMP processes have been developed, though for Ge/SiGe the CMP process is already in an advanced level. Overall the implementation of Ge/SiGe as high mobility channel material is already more mature compared to the activities on III—V materials. As only limited experimental CMP data are currently available, it is clear that these high mobility material CMP processes could stiU be improved with optimized consumables and recipe parameters. Whether or not this optimized process development will be needed remains to be seen, as it is not 100% sure yet that these high mobility materials will indeed be introduced into the <10 nm CMOS technology nodes. [Pg.133]

Hill, R.J., et al., 2013. High Mobility Channel Materials CMP Challenges and Opportunities. [Pg.133]

Skotnicki, T., Boeuf, F., 2010. How Can High Mobility Channel Materials Boost or Degrade Performance in Advanced CMOS. 2010 Symposium on VLSI Technology Digest of Technical Papers, Honolulu, HA, USA. [Pg.135]

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See also in sourсe #XX -- [ Pg.119 ]



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High mobility channel materials achievements

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