High Aspect Ratio Si Etching

Advanced Si Etching (ASE) DRIE High aspect ratio Si etching ICP etching Plasma etching... 

Micro enzyme reactor for continuous glucose monitoring pSi is fabricated on high aspect ratio Si microstmctures of the reactor by electrochemical etch Surface enlarging effect, 100-fold increase in enzyme activity Drott et al. 1998... 

Tian WC, Weigold JW, Pang SW (2000) Comparison of Q2 and F-based dry etching for high aspect ratio Si microstructures etched with an inductively coupled plasma source. 1 Vac Sd Tech 818 1890... 

Figure 1.65 DT capacitance roadmap. The six curves represent different options 1, Si-etch with an aspect ratio (AR) of 45, straight DT profile 2, AR = 45 + bottle shape DT profile 3, AR = 60 4, AR = 60 + bottle 5, AR = 45 + bottle + HSC (hemispherical silicon grains) 6, AR = 45 + bottle + high e dielectric materials such as TiOj, TajOs and AI2O3.

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