Glow discharge plasma, use

Table I. Properties of rf Glow Discharges (Plasmas) Used for Thin-Film Etching and Deposition...

The information on chemical composition and kinetics of oxide films growth on InAs surface, obtained for the first time in situ with the help of XPS method, made it possible to find out the following features of oxide films growth in glow discharge plasma using O2, CO2 gases and gas mixtures O2 and NF3 ... 

Kesler, V.G. (2011). Study of InAs oxidation process in glow discharge plasma using the XPS method in situ. Journal of structural chemistry, 52,, No. 8, pp. S156-S164, ISSN... 

Two types of plasma are currently used in CVD glow-discharge plasma (non-isothermal) and arc plasma (isothermal). Their characteristics are summarized in Table 5.3 and are described in more detail in the following sections. 

In addition to the thermal CVD reactions described above, a glow discharge plasma at 480-650°C has been used to deposit HB2 from the mixed chlorides,... 

Variants of glow discharge plasmas have been used ... 

Sharma AK, GB Josephson, DM Cameron, SC Goheen (2000) Destruction of pentachlorophenol using glow discharge plasma process. Environ Sci Technol 34 2267-2272. 

The microwave-induced plasma (MIP) is the most popular plasma used for conventional GC-OES. However, the DC glow discharge plasma has recently received more attention because it can be operated at a low temperature, albeit at a low pressure 1-30 Torr so as to avoid excessive gas heating and arcing. 

One particular example of what may be called a gas-liquid discharge microreactor is the work of Baba et al. (2006, 2007), who have demonstrated the generation of an atmospheric pressure glow-discharge plasma in contact with liquid paraffin, using a capacitively coupled plasma method. The choice for paraffin has two reasons no hydroxyl group present (which is thought to capture electrons, as is the case in water)... 

DART uses a glow discharge plasma to excite a heated stream of inert gas, usually nitrogen or helium, which is directed onto the surface to be analyzed. These excited state atoms and molecules have been shown to effect,... 

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