Glow discharge PACVD

A common DC glow discharge PACVD system may be varied by operating the plasma at higher pressures and powers at which a DC arc discharge between the electrodes can be produced. In 1988, Kurihara et al.t l first reported the use of the DC plasma arc-jet CVD method, in which... 

Figure 1.3 clearly demonstrates the luminous gas phase created under the influence of microwave energy coupled to the acetylene (gas) contained in the bottle. This luminous gas phase has been traditionally described in terms such as low-pressure plasma, low-temperature plasma, nonequilibrium plasma, glow discharge plasma, and so forth. The process that utilizes such a luminous vapor phase has been described as plasma polymerization, plasma-assisted CVD (PACVD), plasma-enhanced CVD (PECVD), plasma CVD (PCVD), and so forth. 

As discussed in Ch. 6, diamond nucleation enhancement may be achieved by, for example, predeposition of a thin DLC layer in combustion flame or DC glow-discharge plasmas, or, by carburization/biasing to develop a complete SiC layer on the substrate surface in MW PACVD. 

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