Microwave assisted glow discharge

Figure 1.3 clearly demonstrates the luminous gas phase created under the influence of microwave energy coupled to the acetylene (gas) contained in the bottle. This luminous gas phase has been traditionally described in terms such as low-pressure plasma, low-temperature plasma, nonequilibrium plasma, glow discharge plasma, and so forth. The process that utilizes such a luminous vapor phase has been described as plasma polymerization, plasma-assisted CVD (PACVD), plasma-enhanced CVD (PECVD), plasma CVD (PCVD), and so forth. 

In the case of microwave-assisted CVD, the microwave energy from the generator is directed to and focused within a quartz cavity, producing a spherically shaped, glow-discharge plasma directly above the substrate. The substrate can either be positioned outside of (few mm) or immersed within the intense discharge... 

---