Getter ion pump

Table IV shows X-ray data (55) on the homogeneity of Pd-Ag films prepared by simultaneous evaporation from separate sources, either in conventional vacuum or in UHV, with the substrate maintained at 0°C. The second group of films was prepared using a stainless steel system incorporating a large (100 1/sec) getter-ion pump, sorption trap, etc., but deposited inside a glass vessel. By the tests of homogeneity adopted, alloy films evaporated in conventional vacuum were not satisfactory, i.e., the lattice constants were generally outside the limits of the experimental error, 0.004 A, and the X-ray line profiles were not always symmetrical. In contrast, alloy films evaporated in UHV were satisfactorily homogeneous. Further, electron micrographs showed that these latter films were reasonably unsintered and thus, this method provides clean Pd-Ag alloy films with the required characteristics for surface studies.

Vacuum technology acceptance specifications for getter-ion pumps 8/85... 

Vacuum pumps acceptance specifications Part IV (Getter-ion pumps) 28429 1976... 

The pumping system is the most important part of the vacuum line, it is certainly the most expensive, and it should therefore be chosen with care. Because the pumping system on a chemist s vacuum line must be robust and capable of removing large quantities of gases, often in repeated cycles, sorption pumps, getter ion pumps, and sublimation pumps are generally unsuitable and are therefore not discussed in this book. 

Any coating that develops on the ion source of the helium leak detector will hinder operation. This coating is not easy to prevent because during operation, the ion source behaves like a getter-ion pump, drawing materials to its surface. Therefore anything that can be done to protect the ion source without hindering normal operation is desirable. 

Vacuum pump, ion pump A capture-type vacuum pump where a getter material is deposited by sputtering and gaseous ions are accelerated to the reactive surface to react with the surface or be physically buried in the depositing material. Also called a Getter ion pump. 

Chapter 3 also considered those entrapment pumps that remove gas particles by sorption effects such as gettering and implantation. The operating principles of sputter ion pumps were explained (Example 3.26) and some typical calculations performed (Examples 3.27-3.29). Aspects of the use of titanium sublimation pumps were dealt with (Examples 3.30-3.33). 

Six different types of pump are used to evacuate a vacuum system. The first and most common is the mechanical displacement pump [226,227]. The second is the vapour stream pump [228]. The third is the modem turbomolecular pump [229]. The fourth type is the chemical getter pump. The fifth is the ion pump and the sixth is the cryogenic pump [230]. In technical coating systems, the first three types of pump are preferred. The development of these pumps is narrowly associated with the names W. Gaede, I. Langmuir, C. Burch, K. Hickman and W. Becker [221,225]. Cryogenic pumps have also been used to evacuate technical coating plants. 

Capturing and keeping the gas molecules (adsorption pump, absorption or reaction pump) - e.g. cryopump, sorption pump, ion pump, getter pump, absorption pump, getter pump. 

Sputter-ion pump A capture (getter) pump in which the gettering material is continuously being renewed by sputter deposition. See also Vacuum pump. 

FIGURE 11.17 Schematic of mass spectrometer used for stratospheric measurements (IG = ion getter pump, PS = pressure sensor) (adapted from Arnold and Hauck, 1985). 

The basic ECELL geometry consists of small apertures above and below the sample and the apertures are mounted inside the bores of the objective lens polepieces (figure 2.10(d)). The controlled environment ECELL volume is the normal sample chamber of the microscope. It is separated from the rest of the column by the apertures in each polepiece and by the addition of a gate valve, which is normally kept closed, in the line to the usual ion-getter pump (IGP) at the rear of the column. Differential pumping systems are connected between the... 

Wagener (31) reported that the sticking probability of CO on titanium at room temperature was very close to unity. In consequence, since CO is one of the primary residual components in most ultrahigh vacuum systems, titanium has received extensive use in recent years in ion and getter pumps for attaining this type of vacuum condition. It... 

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