Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

FUNDAMENTALS OF PLASMA-ASSISTED CVD

There are numerous materials, both metallic and ceramic, that are produced via CVD processes, including some exciting new applications such as CVD diamond, but they all involve deposition on some substrate, making them fundamentally composite materials. There are equally numerous modifications to the basic CVD processes, leading to such exotic-sounding processes as vapor-phase epitaxy (VPE), atomic-layer epitaxy (ALE), chemical-beam epitaxy (CBE), plasma-enhanced CVD (PECVD), laser-assisted CVD (LACVD), and metal-organic compound CVD (MOCVD). We will discuss the specifics of CVD processing equipment and more CVD materials in Chapter 7. [Pg.272]

See other pages where FUNDAMENTALS OF PLASMA-ASSISTED CVD is mentioned: [Pg.40]    [Pg.41]    [Pg.43]    [Pg.45]    [Pg.47]    [Pg.49]    [Pg.51]    [Pg.53]    [Pg.55]    [Pg.57]    [Pg.59]    [Pg.61]    [Pg.63]    [Pg.65]    [Pg.40]    [Pg.41]    [Pg.43]    [Pg.45]    [Pg.47]    [Pg.49]    [Pg.51]    [Pg.53]    [Pg.55]    [Pg.57]    [Pg.59]    [Pg.61]    [Pg.63]    [Pg.65]    [Pg.133]    [Pg.150]   


SEARCH



CVD

Plasma-assisted CVD

© 2024 chempedia.info