Film adhesives chip stacking

In this approach, entire wafers or segments of wafers containing ICs are stacked. Interconnections are formed from vias in the silicon. In vertically stacking memory chips or other IC chips, the chips are first thinned to several mils (4 mils or less), then adhesive bonded, and electrically interconnected directly from chip-to-chip, either from the edges or through vias in the silicon. In these approaches, both electrically conductive and electrically insulative adhesives are used. Thermally conductive preform adhesives or thin thermoplastic films are used to bond and isolate the chips within the stack and to dissipate heat. Several processes are available to vertically stack and interconnect chips of the same size and function such as SRAM, flash, and DRAM memory chips. Other processes have been developed to vertically stack chips of different sizes and functions, or to horizontally interconnect different chips in one layer, then vertically stack the layers. ... 

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