Factors That Determine Pressure Under a Glow Discharge in Flow

FACTORS THAT DETERMINE PRESSURE UNDER A GLOW DISCHARGE IN FLOW 

Because the pressure before glow discharge initiation does not determine the pressure under a glow discharge, it is important to find the factors that determine this parameter. As far as the gas phase is concerned, the plasma polymerization in a closed system can be described as 

in a flow system, LCVD is visualized as a process that changes the flow rate of gas. 

The flow rate Fi of monomer coming into the reactor is given by the pressure Pi of the flow system before glow discharge initiation, according to Eq. (12.1)  

As soon as the reaction (plasma polymerization) occurs, dnjdt changes to jdnjdt, and this flow of gases must be pumped out by the vacuum system for a steady-state flow to be maintained. As far as the system pressure is concerned, we can assume that jdnjdt or p2 = jFi is introduced into the system, and the same equation can be used [i.e., Eq. (12.1)] to find the new system pressure p2- 

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