Ellipsometry characteristics

Ellipsometry measurement of the characteristics of polarised light after reflection from a surface. 

In order to relate material properties with plasma properties, several plasma diagnostic techniques are used. The main techniques for the characterization of silane-hydrogen deposition plasmas are optical spectroscopy, electrostatic probes, mass spectrometry, and ellipsometry [117, 286]. Optical emission spectroscopy (OES) is a noninvasive technique and has been developed for identification of Si, SiH, Si+, and species in the plasma. Active spectroscopy, such as laser induced fluorescence (LIF), also allows for the detection of radicals in the plasma. Mass spectrometry enables the study of ion and radical chemistry in the discharge, either ex situ or in situ. The Langmuir probe technique is simple and very suitable for measuring plasma characteristics in nonreactive plasmas. In case of silane plasma it can be used, but it is difficult. Ellipsometry is used to follow the deposition process in situ. 

Imaging on a larger scale, in particular when large numbers of adsorbate molecules organize themselves in patterns of micrometer size, is possible by using recently developed methods based on photoemission (PEEM) and ellipsometry (EMSI). These techniques have provided us with spectacular movies of reaction wave fronts moving over surfaces. These phenomena are characteristic of oscillating surface reactions, a subject that has fascinated many in catalysis and surface science [81. 

Wasserman [186] has described the use of both low-angle X-ray reflectivity and ellipsometry for the determination of thickness of Cio-Cig SAMs prepared on surface silanol groups of silicon plates. Ellipsometry is based on the reflection of polarized light from a sample and depends on the sample s thickness and refractive index. X-ray reflectivity measures the intensity of X-rays reflected from a surface (or interference pattern) that is characteristic of the distance between interfaces. The thickness of the SAMs was consistent with fully extended alkyl chains with all-trans conformations and excellent agreement was observed between the two methods. 

The pH responsiveness of a 3-PAA/Au graft that was amidated with N,N-dimethylaminoethylenediamine was also studied by in situ ellipsometry [32]. This amine-containing graft had pH dependent swelling characteristics that were opposite to those of the - C02H-rich graft because the amine-rich film... 

Fluorescence measurements of the differently funtionalized quartz slides in acetonitrile showed the characteristic emission of each fluorophore, confirming the successful attachment of the fluorophore on the monolayer.1 Each layer was characterized by contact angle, ellipsometry and X-ray photoelectron spectroscopy measurements, confirming the introduction of the different building blocks. 

EUipsometry has already been cited as the method that first established that passivity was associated with the presence of a very thin oxide film. Later it was measured (Jovancicevic, 1987) by means of ellipsometric spectroscopy and it was thus found possible to evolve an extinction coefficient that varied characteristically with the wavelength at which the ellipsometry was carried out (Fig. 12.66). The interpre-... 

In this work the studies of optical characteristics, including photoluminescence and optical conductivity a(E) of the C6o and Cd-C6o films with different radiation doses by argon ions with the energy of 0,3 keV are carry ouied. The films of fullerenes C6o and Cd-C6o with the admixture of the C70 molecules ( 10 mass %) are precipitated out to the substrates from the stainless steel (temperature of the substrate was equal to 473 K) during the vacuum sublimation [7]. Photoluminescence was studied with the laser excitation with a wavelength of 514,5 nm [8], Optical conductivity was measured with the use of a method of spectral ellipsometry [9-10],... 

Ellipsometry has also been used to study the growth or changes in the characteristics of polymer films on electrodes (Chapter 14). For example, ellipsometric measurements... 

On the other hand, aluminum metal also has an oxide coating. Smith (29) found that the layer is approximately 5 nm thick on ethanol-HC104-electropolished metal and about 20 nm thick on acid-dichromate-etched metal (also determined by ellipsometry). However, adsorption of virus on aluminum is considerably stronger than on AI2O3 and is quite characteristic of metals as predicted by the Lifshitz theory. 

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