Electron image projection

Fig. 6 Comparison of image projection in optical and electron microscopes. In the former, an optical lens focuses and enlarges a beam of light. In the electron microscope, a magnetic coil is used to bend electron rays for focusing and enlargement of the specimen. (Adapted from Ref. 1.)...

Figure 44. Schematic of electron beam image projection systems (a) image formed by electrons emitted from a photocathode, and (b) image formed by an absorbing mask pattern on an electron transparent substrate.

The data presented here were taken with an apparatus similar to the one recently described by Parker and Eppink [25], The difference between it and the original photofragment imaging apparatus of Chandler and Houston [23] is that the flat screens, through which the ions or electrons are projected were replaced by a series of concentric electrodes. These form an electrostatic lens that, when the appropriate voltages are applied, will focus... 

Figure 3.49 Configuration of dislocations in a thin foil when they line up in a single slip plane (a) orientation relation between primary electron beam and dislocations in a crystal plane and (b) the dislocation images projected on a TEM image plane.

Microelectromechanical systems (MEMS) combine the electronics of microchips with micromechanical features and microfluidics to create unique devices. The multitude of MEMS applications continues to grow including many types of accelerometers, radio frequency (RF) devices, variable capacitors, strain and pressure sensors, deformable micromirrors for image projection systems, vibrating micro-membranes for acoustic devices, ultrasound probes, micro-optical electromechanical systems (MOEMS) and MEMS gyroscopes, to name a few. 

I. Mori, K. Sugihara, C. Itoh, M. Tabata, and T. Schinozaki, An electron beam image projection system with automatic wafer handling, Microelectron. Eng. 3, 69 (1985) T.W. O Keefe, J. Vine, and R.M. Handy, An electron imaging system for the fabrication of integrated circuits, Solid... 

Finally, an image of the electrons is projected through the energy filter to a third plane referred to as the detection plane. Often, photoelectron spectrometers are equipped with either multiple discreet detectors or, in the example shown, a single position-sensitive detector in order to increase detection efficiency by counting the electron signal multiple times as it passes along the detection plane. 

Figure 5. Scanning electron micrograph of negative images projection-printed at 0.4 mJ/cm of 248 nm radiation in preliminary tertiary alcohol resist containing...

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