Electron backscattering diffraction EBSD

Electron backscatter diffraction (EBSD) — The focused electron beam of Scanning Electron Microscopes (SEM) can be used to detect the crystallographic orientation of the top layers of a sample. The backscattered electrons (information depth 40-70 nm at 25 kV accelerating potential, lateral resolution around 200 nm) provide characteristic diffraction patterns (Kikuchi lines) on a phosphor screen. The patterns are recorded by a CCD-camera and interpreted by software. The position of the unit cell of the sample is determined by the corresponding Euler angles. In scanning mode, the software produces a surface orientation mapping that consists of... 

Fig. 12.9. Electron backscatter diffraction (EBSD) map showing the grain structure of a poly-Si film on glass prepared by the ALILE process (left) and the corresponding inverse pole figure showing the preferential (100) orientation of the poly-Si surface (right). The region used for the definition of the preferential (100) orientation -R(ioo) is indicated by a dashed line (20° tilt with respect to the perfect (100) orientation). The sample was annealed at 425°C for 16 h. Afterwards the Al(+Si) top layer was removed by CMP. The area under investigation was 80 x 80 pm2. Red, green and blue correspond to (100), (110) and (111), respectively, (from [39])...

The authors would like to express their thanks to NSERC for funding this work and for scholarship support (JS). Thanks are also extended to the UBC mechanical, electronic, and glassblowing services, whose efforts have been crucial in the development of these experiments. The determination of the surface crystallography by electron-backscattered diffraction (EBSD) was performed by Prof. C. Sinclair, and creation of the stepped surface was accomplished by Dr. M. Beaudoin. 

Also electron diffraction methods like electron backscatter diffraction (EBSD) can deliver phase information (see Fig. 4). EBSD, applied in scanning electron microscopes, assigns to each surface grain its phase affiliation and its orientation as a result of detected Kikuchi diagrams during specimen scanning (Schwartz et al. 2009). Figure 4 shows an EBSD analysis result for a two-phase titanium specimen. 

When the surfaces of the samples are crystalline, electron backscatter diffraction (EBSD) patterns, called Kikuchi lines, generated from reflected electrons, are observed. EBSD patterns provide knowledge concerning crystal stmctures and orientations. Thus, the combination of SEM and EBSD is one of the powerful tools, which can tell us the microstmctures of the sample surfaces and the orientations of the grains on the sample surfaces. 

Koblischka-Veneva A, Koblischka MR (2008) Analysis of twin boundaries using the electron backscatter diffraction (EBSD) technique. Mater Sci Eng B Solid State Mater Adv Technol 151(l) 60-64... 

Copper-based catalysts are of considerable importance for industrial reactions, e. g. partial oxidation reactions. This contribution reports on a broad study of the catalytic activity of copper in model redox reactions, e. g. methanol oxidation and oxidative coupling of methane. In addition the interaction of Cu with these reactive gases was investigated by thermoanalytic techniques (TG/DTA, DSC), temperature programmed oxidation and reduction (TPO/tpR) and thermal desorption spectroscopy (TDS). Scanning electron microscopy (SEM) and electron backscattering diffraction (EBSD) was additionally used to characterise the copper catalyst before and after catalytic action. 

Elektronenraffer, Elektronenempfanger electron backscatter diffraction (EBSD)... 

Changes in the film microstructure (e.g. texture and grain-size distribution) of the laser-treated Pt thin films were analyzed using Electron Backscatter Diffraction (EBSD). The determination of the orientation of the crystal ensemble and the grain-size distribution has been performed on the cross-like pattern showed in Fig. 9(c). 

In the same manner, hardness measurements and Electron Backscatter Diffraction (EBSD) analysis allow following the microstmcmral evolutions during the course of the manufacturing. 14Cr-ODS mother mbes exhibit a hardness level that is much higher than that of 9Cr-ODS mbes. After hot extmsion, hardness measurements... 

The capabilities of SECCM are demonstrated most powerfully when it is used in the imaging mode, where a surface of interest is scanned with the SECCM probe meniscus to produce x-y maps of surface reactivity, simultaneously with topography and ion conductance (between the two QRCEs). SECCM images can be complemented with a variety of structural characterization techniques, applied to the same region of the surface, such as FE-SEM, micro-Raman, AFM, and electron backscatter diffraction (EBSD). This type of multimicroscopy approach provides a rich and powerful platform for elucidating how local reactivity is influenced by the properties of the surface under investigation. 

Since its development in the 1970s and 1980s, the electron backscatter diffraction (EBSD) technique has become the most widely used method for micro-texture investigations in recent years [150,151]. The EBSD system is usually attached to a Scanning Electron Microscope. By arranging the specimen at an appropriate angle, an electron diffraction pattern can be generated and captured on film, a camera or a screen. The diffraction pattern is called a Kikuchi diffraction pattern, which consists of pairs of parallel lines, each of... 

Electron backscatter diffraction (EBSD) has been successfully applied to reveal grain boundaries in oxide scales and analyse their texture stmctures by some previous studies. It has also been used for phase identification, which is inconvenient and expensive and appears to have no advantages over the conventional metallographic method. 

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