Drying chambers support systems

Drying chambers are usually constructed of stainless steel sheet metal, with stiffeners for structural support and vessel integrity. Sheet steel finish and weld polish can be specified to meet any requirement. Insulation is usually applied to the outside of the vessel, and stainless steel wrapping is seam welded over the entire vessel. This provides a thermally efficient and safe system that is easy to clean and has no crevice areas that might become contaminated. 

Si wafers of n-type and (100) orientation covered by thermally grown 100 nm SiO2 layer fabricated at 1100 °C in dry O2, were used as substrates. The wafers were loaded into an oil free evaporation chamber (Varian VT-460), and the system was evacuated down to lxlO 8 Torr. Ge ingot of 99.999 % purity was supported on a molybdenum plate, and it was evaporated using an electron gun, at an evaporation rate of 0.01-0.03 nm/s, at a pressure of lxlO"7 Torr. During evaporation, and for an additional 1 min after this process, the substrate temperature was kept at 350 °C. The temperatures were monitored by small-heat-capacity Ni-NiCr thermocouples, while the film thicknesses were measured by a vibrating quartz probe. For this study, four different samples have been prepared with different Ge evaporation times of 25, 50, 75, and 100 s for samples No. 1, 2, 3, and 4, respectively. After germanium evaporation, the samples were moved to a cold place inside the vacuum chamber. 

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