Digital mirror array

Surface micromachining is not limited to the polysilicon/sUicon dioxide combination of materials other combinations are listed in Table 3. With polysilicon and silica, up to five layers have been demonstrated for complex mechanisms in the SUMMiT at Sandia National Laboratories [40]. An example of a very successful metal surface micromachining process is that used at Texas Instmments for their digital mirror array light modulators which are a used in video projectimi display systems [41]. 

Beanland. r.lectron Microscopy and Analysis, 3rd ed.. London Taylor and Francis. 2001. p. 123.) (b) A nine-micromirror array used lo develop digital micromirror spectrometer for atomic spectroscopy, Mirrors are 16 16 pm on 17-pm centers. Removing the center mirror reveals underlying components. (From J. 1). Batchelor and B. T. Jones. Anal. Chem., 1998, 70. 4907. Copyright 1998 American Chemical Society.) (c An algae mat taken in fully wet condition wilh an ESEM instrument with a gas-phase secondary-eleclron detector with cascade amplification. No sample preparation was needed, From P. J. Goodhew. J. Flumphreys, and R. Beanland. Electron Microscc y sncf Analysis 3rd ed.. London Taylor and Francis. 2001. p. 167 )... 

An improved version of SL is called microstereolithography (pSL) that uses a lens to focus the laser beam and achieve resolution in the micrometer range." Alternatively, SL can be coupled with digital light projection, which uses an array of mirrors to project a 2D pattern onto the platform. Thereby, a complete layer of resin can be photopolymerized at one time, reducing the exposure time and improving the throughput of the process. ... 

Fig. 1.27. An array of surface-micromachined mirrors used in a portable digital projector. The center mirror has been removed to expose the remaining segments of the rectangular torsion bar and the electrodes used for angular positioning. (Photograph courtesy of Texas Instruments, Attleborough, Massaehusetts. Reproduced with permission.)...

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