CVD Oxides for Corrosion-Resistance Applications

The main characteristic of refractory oxides is their excellent resistance to oxidation. Their brittleness however makes them prone to thermal shock with the exception of silica which has a compensating low coefficient of thermal expansion. The chemical resistance of the major oxides deposited by CVD is rated in Table 17.7. 

Alumina good fair good good good 

Hafnia good fair good poor good 

Silica poor poor good poor poor 

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