Coupled process analytical technology

Another emerging technology is supercritical fluid chromatography (SFC) that uses supercritical carbon dioxide as the apolar eluent [46]. The main advantage of SFC, which can be applied both in the analytical and in the purification area, is the higher resolution than the traditional HPLC, allowing time reduction and more efficient separations. Also this technique can be advantageously coupled with a MS detector, to further improve the full analytical process. 

Chemical vapor deposition in general, and CVD of metals in particular is a complex process. Comprehension of the underlying mechanisms requires a multi-disciplinary approach, and different scientific and technological skills. For example, the coupling of gas phase analysis with the microstructure of the material was demonstrated in this chapter. It was confirmed that mass spectrometry is a powerful analytical instrument. However, in order to propose a surface reaction scheme, it was necessary to make different assumptions. This kind of study is complementary to high vacuum investigation of surface reactions. 

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