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Copper interlayering with

For future high-speed microelectronic devices, copper interconnection with low dielectric constant (low-k) interlayer films is required to decrease RC (R interconnect resistance, C interlayer dielectric capacitance) delay. Recently, porous Si02 and silica-based films, developed for low-k films, have been extensively studied by positron annihilation spectroscopy [28], [29], [19]. Since Ps formation occurs with high probability, and the o-Ps annihilate via pick-off process in Si02-based materials, positron annihilation spectroscopy (especially PALS) gives useful information on the size of the pores. [Pg.246]

The nanocomposite stmcture studies using wide-angle x-ray diffrac-tometry were carried out on a general area diffraction detection system using copper irradiation with a wavelength (1) of 1.54 A. The distance between MMT platelets interlayer spacing) was calculated according to these measurements. [Pg.316]

Figure 7.40. Simulated spectra of isotropic 10-A film of cuprous ethyl xanthate complex (a) (1) transmission spectrum (2) reflection spectrum of film deposited on copper measured with p-polarization, at angles of incidence of 80° (solid line) and 20° (x50, dashed line). Reprinted, by permission, from J. A. Mieiczarski, J. Phys. Chem. 97, 2649 (1993), p. 2651, Fig. 3. Copyright 1993 American Chemical Society (b) Reflection p- (solid line) and s-polarized (dashed lines) spectra of film on CU2S probed through ZnSe window at angles of incidence of 45° and water interlayer 1 n-m thick. Adapted, by permission, from J. A. Mieiczarski, E. Mieiczarski, J. Zachwieja, and J. M. Cases, Langmuir 11, 2787 (1995), p. 2792, Fig. 3. Copyright 1995 American Chemical Society. Figure 7.40. Simulated spectra of isotropic 10-A film of cuprous ethyl xanthate complex (a) (1) transmission spectrum (2) reflection spectrum of film deposited on copper measured with p-polarization, at angles of incidence of 80° (solid line) and 20° (x50, dashed line). Reprinted, by permission, from J. A. Mieiczarski, J. Phys. Chem. 97, 2649 (1993), p. 2651, Fig. 3. Copyright 1993 American Chemical Society (b) Reflection p- (solid line) and s-polarized (dashed lines) spectra of film on CU2S probed through ZnSe window at angles of incidence of 45° and water interlayer 1 n-m thick. Adapted, by permission, from J. A. Mieiczarski, E. Mieiczarski, J. Zachwieja, and J. M. Cases, Langmuir 11, 2787 (1995), p. 2792, Fig. 3. Copyright 1995 American Chemical Society.
Nickel in Nanometer Materials. Coating a metal with an ultrathin layer of another metal creates properties not found separately in either of the materials. Considerable recent research has been directed toward improving the mechanical properties of bimetallic laminates, sometimes called composition modulatedfilms, which have interlayers only a few nanometers thick. Attractive properties also have been found for similar systems, called nanometer materials. Nickel has been used in combination with copper, ruthenium, and other metals for producing these new materials. [Pg.1072]

Here, the adsorption of valine on different cation-exchanged montmorillonites is described (Nagy and Konya 2004). A discussion of the kinds of interactions that are possible in the ternary system of montmorillonite/valine/metal ions will be presented, and a description how the metal ions can affect these interactions. The interlayer cations (calcium, zinc, copper ions) were chosen on the basis of the stability constants of their complexes with valine. The adsorption of valine on montmorillonite is interpreted using a surface-complexation model. [Pg.134]

The results with Cu - and Cu -TSMs (27) are also shown in Table III. Cu -TSM was obtained similarly to Cu -TSM using the Cu(I) ammine complex salt in the ion-exchange reaction. Cu -TSM, copper supported on TSM, was prepared by calcination and subsequent hydrogen reduction of an oligomeric cupric hydroxide intercalate, which had been obtained by precipitating the hydroxide into the interlayer spaces of TSM after the titration method developed by Yamanaka and Brindley (8). The catalytic activity of Cu -TSM is so poor as to be less than one-tenth of that of Cu -TSM, although the molar content of Cu is about twice as high. Because a weak sig-... [Pg.309]

One test of the method was conducted over a medium-sized iron-copper deposit near the southeastern coast of China. The ore body occurs in a skam near to the contact of granodiorite with interlayered marbles and homfels. The attitude of the ore body is controlled by the contact, which generally is steep. The strike of the ore zones is approximately east-west, plunging west, and their western contact is westerly convex. The top of the ore body, which may have been eroded, is now covered by 140 to 160 m of transported sediments. There is a thick soil cover the ground surface is quite flat and suitable for arable farming. [Pg.297]

Hydrotalcites are a class of two-dimensional materials consisting of mixed metal hydroxide sheets interspersed with interlayer anions. It is known in the chemistry of hydrotalcites, that it is difficult to synthesize single-phase copper containing hydrotalcites while copper is an important clement explored for various selective oxidation reactions. However, it is also known that Cu-containing hydrotalcites can be synthesized with an addition of another bivalent metal ion. which by itself can independently form hydrotalcites. [Pg.92]


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Interlayering

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