Containing Polymers for High-Performance Resist Applications

Metal-Containing Polymers for High-Performance Resist Applications 

University ofTwente, MESA Research Institute, Enschede, 

Structnre Formation via Block Copolymer Self-Assembly 126 

Macromolecules Containing Metal and Metal-like Elements, 

Volume 2 Organoiron Polymers, Edited By Alaa S. Abd-El-Aziz, 

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Lammertink RGH, Korczagin I, Hempenius MA, Vancso GJ (2004) Metal-containing polymers for high-performance resist applications. In Abd-El-Aziz AS, Carraher CE, Pittman CU, Sheats JE, Zeldin M (eds) Macromolecules containing metal and metallike elements, vol 2. WUey, New York, p 115-133... 

Polymers containing no secondary or tertiary C-H or are aromatic (PEEK or Kevlar ) or perfluorpolymers (PTFE) are generally resistant to oxidation and require no anti-oxidant additives. However, the high temperature necessary for curing or fabrication of high performance polymers (especially for aerospace applications) can cause oxidation. For this reason, these materials are often prepared and fabricated under a nitrogen atmosphere. 

As part of an effort to develop high-performance, high-temperature-resistant polymers for microelectronics applications, we also recently described a series of both partially fluorinated and nonfluorinated poly(aryl ether ketone)s containing amide, amide-imide, cyano oxadizole, or pyridazine groups and characterized their thermal and electrical properties.11... 

Fluoroelastomers are fluorine-containing hydrocarbon polymers with a saturated structure obtained by polymerizing fluorinated monomers such as vinylidene fluoride, hexafluoropropene, and tetrafluoroethylene. The result is a high-performance s)mthetic rubber with exceptional resistance to oils and chemicals at elevated temperatures. Initially, this material was used to produce O-rings for use in severe conditions. Although this remains a major area of application, these compoimds have found wide use in other applications because of their chemical resistance at high temperatures and other desirable properties. 

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