Ceramic membranes physical vapor deposition

In the last decade, a variety of porous substrates were proposed for supporting the dense membranes, such as ceramics, metals, and alloys [42-44]. In those studies, special attention was paid to the LSCF coating on metallic substrates by using physical methods such as plasma spray physical vapor deposition and magnetron sputtering as an alternative to the wet chemical deposition methods [43,44]. When considering ceramic substrates, besides the elastic behavior and the thermal expansion of the perovskites, other properties such as toughness... 

Several researchers are investigating the feasibility of Pd-based membranes deposited onto highly permeable, porous metal and/or ceramic substrates. Fig. 10.7a [76,116-119]. Currently, the most common method used for the deposition of the active membrane layer onto the porous substrate is electroless plating, although some researchers have utilized physical and chemical vapor deposition techniques. 

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