Calorimetric sensing mode

Calorimetric Sensing Mode for Operation at Constant Temperature... 

A problem of the calorimetric sensing mode is its cross-sensitivity to changes in ambient temperature. The realization of an additional temperature sensor on the bulk chip solves this problem. The signal-to-noise ratio of the calorimetric mode... 

The third block in Fig. 2.1 shows the various possible sensing modes. The basic operation mode of a micromachined metal-oxide sensor is the measurement of the resistance or impedance [69] of the sensitive layer at constant temperature. A well-known problem of metal-oxide-based sensors is their lack of selectivity. Additional information on the interaction of analyte and sensitive layer may lead to better gas discrimination. Micromachined sensors exhibit a low thermal time constant, which can be used to advantage by applying temperature-modulation techniques. The gas/oxide interaction characteristics and dynamics are observable in the measured sensor resistance. Various temperature modulation methods have been explored. The first method relies on a train of rectangular temperature pulses at variable temperature step heights [70-72]. This method was further developed to find optimized modulation curves [73]. Sinusoidal temperature modulation also has been applied, and the data were evaluated by Fourier transformation [75]. Another idea included the simultaneous measurement of the resistive and calorimetric microhotplate response by additionally monitoring the change in the heater resistance upon gas exposure [74-76]. 

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