Bosch trench process

For automotive applications, the various functions require several special material properties. Here, we concentrate on properties of thin films rather than on their production processes. A wide range of publications deal with sensor-specific processes, for example, silicon reactive ion etching (RIE) using the Bosch trench process [2] and sacrificial oxide etching [3, 4]. The details of standard deposition and structuring processes are described in numerous books on semiconductor technology (e.g., [5, 6]), and they are not discussed in depth here. 

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