Glow discharge deposition boron

The glow discharge of boron trichloride has been studied by several workers (1, 2, 3, 8, 10, 11, 12, 13, 14, 15, 16) in the field, and their results should indicate the deposit to be expected at high ratios of boron trichloride to hydrogen. Holzmann and Morris (3) analyzed the light... 

General. The results of these experiments show that boron can be deposited on a dielectric substrate in a glow discharge (see Figure 3). There is no limit on the coating thickness inherent in the process. Complete control of the process parameters has not been achieved, but there is no reason to believe that control cannot be achieved. The results obtained so far indicate that gas purity, gas composition, and RF. power input are among the most important factors. 

This paper basically represents a feasibility study of the deposition of boron from a glow discharge system produced in a boron trichloride-hydrogen medium. Feasibility of the basic concept has been conclusively... 

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