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Basic Idea of Photopolymerization

Liquid photo-curable resin is used in UV nanoimprint lithography (UV-NIL).i Basic ideas of photopolymerization are shown in Chapter 1. Liquid photo-curable resins change from liquid to solid by UV irradiation. The change is produced by polymerization of a monomer or oligomer constituted in the resin. Initiators induce polymerization by UV irradiation. Resins of UV-NIL are classified into several types by polymerization systems radical polymerization, ion polymerization, and ene-thiol polymerization. Details of those systems are described in below. [Pg.126]

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Photopolymerization

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