Anodic Polarization Curve and Conditions for Electrochemical Planarization

4 Anodic Polarization Curve and Conditions for Electrochemical Planarization 

Electrochemical dissolution depends on many factors such as applied anode potential, electrolyte, temperature, interelectrode distance, disk rotation speed. 

Depending on the anode material, electrolyte, and other factors, the polarization curves can have various shapes. A typical polarization curve of copper in phosphoric acid solution is shown in Fig. 10.6. At low potential (close to zero), electrochemical reactions of low redox potentials such as 

FIGURE 10.5 Schematic of the setup for anodic polarization curve measurements. 

FIGURE 10.6 Polarization curve and surface topography after anodic dissolution in 

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