Actuator large-scale integrated

Grover, W.H., Skelley, A.M., Liu, C.N., Lagally, E.T., Mathies, R.A., Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices. Sensors Actuators B 2003, 89, 315-323. 

Linear actuated devices Pressure driven laminar flow WIicrofluidic large scale integration Segmented flow microflu id tcs... 

Besides microfluidics the human-machine interaction, especially the imaging systems, could enormously benefit from the availability of large-scale integrated actuator systems. Such systems could provide an additional mechanical data channel intended for the sense of touch of the human, which is a very sensitive aesthesia. A first impression about the performance of a high-resolution tactile display gives the artificial skin (Fig. 15a). 

Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices. Sensors Actuators B 89(3) 315-323... 

The arrival of integrated circuits with very good performance/price ratios and relatively low-cost microprocessors and memories has had a profound influence on many areas of technical endeavour. Also in the measurement and control field, modem electronic circuits were introduced on a large scale leading to very sophisticated systems and novel solutions. However, in these measurement and control systems, quite often sensors and actuators were applied that were conceived many decades ago. Consequently, it became necessary to improve these devices in such a way that their performance/price ratios would approach that of modem electronic circuits. 

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