SEARCH Articles Figures Tables Chemical amplification Chemical amplification of resist lines Chemical amplification of resist lines CARL) Chemical amplification positive resists and their imaging mechanisms Chemical amplification positive resists based on depolymerization Chemical amplification positive resists based on deprotection Chemical amplification resist Chemical amplification resist Chemical resistance Depolymerization chemical amplification resists based Ester protected chemical amplification resists Resist materials chemical amplification Resists based on chemical amplification Resolution limits due to chemical amplification in resists