SEARCH Articles Figures Tables Acetal-protected chemical amplification Amplification and Filtering of Chemical Signals Based on chemical amplification Chemical Amplification of Photopolymers Chemical amplification concept Chemical amplification design Chemical amplification mechanisms for Chemical amplification of resist lines Chemical amplification of resist lines CARL) Chemical amplification photoresists Chemical amplification positive resists and their imaging mechanisms Chemical amplification positive resists based on depolymerization Chemical amplification positive resists based on deprotection Chemical amplification process Chemical amplification resist Chemical amplification resists Chemical amplification, peroxy radical measurement Chemical potential amplification Depolymerization chemical amplification resists based Environmentally stable chemical amplification Environmentally stable chemical amplification positive photoresist Ester protected chemical amplification Ester protected chemical amplification resists Lithography chemical amplification On chemical amplification Polymers for Chemical Amplification Resist materials chemical amplification Resists based on chemical amplification Resolution limits due to chemical amplification in resists