Vapor-deposited electrodes

The radio-frequency glow-discharge method [30-34] has been the most used method in the study of a-C H films. In this chapter, it is referred to as RFPECVD (radio frequency plasma enhanced chemical vapor deposition). Film deposition by RFPECVD is usually performed in a parallel-plate reactor, as shown in Figure 1. The plasma discharge is established between an RF-powered electrode and the other one, which is maintained at ground potential. The hydrocarbon gas or vapor is fed at a controlled flow to the reactor, which is previously evacuated to background pressures below lO"" Torr. The RF power is fed to the substrate electrode... 

This is comparable to or slightly higher than the values reported for single crystal (11) and polycrystalline Ti02 (12), and much higher than those for the TiC>2 film electrode prepared by other methods such as chemical vapor deposition (13) and oxidation (14) and anodization (15) of Ti metal. The high efficiency of the dip-coated Ti(>2 film may be attributed to the porous nature of the film as described below. 

The quartz balance uses a thin quartz crystal, a few hundred /xm thick, with thin, vapor-deposited gold films on the two sides. Such a crystal has a fundamental mode for shear waves with a frequency in the 1-15 MHz region, which can be excited by application of a corresponding alternating voltage on the two electrodes. The resonance frequency is very sensitive to small mass changes of the system. One... 

A schematic view of the cold cathode fabrication process is shown in Fig. 10.18. The cold cathode is fabricated by low pressure chemical vapor deposition (LPCVD) of 1.5 pm of non-doped polysilicon on a silicon wafer or a metallized glass substrate. The topmost micrometer of polysilicon is then anodized (10 mA cnT2, 30 s) in ethanoic HF under illumination. This results in a porous layer with inclusions of larger silicon crystallites, due to faster pore formation along grain boundaries. After anodization the porous layer is oxidized (700 °C, 60 min) and a semi-transparent (10 nm) gold film is deposited as a top electrode. 

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