Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Ultrathin preparative aspects

Perhaps the greatest disadvantage of CSD is the difficulty in depositing ultrathin films (thickness <30 nm). While the possibility has been demonstrated in selected systems, the method is not usually viewed as amenable to that thickness requirement. Another disadvantage of CSD is the fact that three-dimensioanl structures with high aspect ratios cannot be conformally coated. Lastly, while epitaxial films have been prepared by the method, ° generally the films produced are polycrystalline and often not oriented. [Pg.552]


See other pages where Ultrathin preparative aspects is mentioned: [Pg.490]    [Pg.361]    [Pg.97]    [Pg.376]    [Pg.2896]    [Pg.193]    [Pg.203]    [Pg.406]    [Pg.171]    [Pg.158]    [Pg.392]   


SEARCH



Preparative Aspects

Ultrathin

© 2024 chempedia.info