Tungsten silicide structure

Fig. 4.14 (a) A few atomically resolved images of surfaces of WSi2 where Si atoms arc invisible. In tungsten silicide, only the W sublatticc is seen in the field ion image. Sec Section 4.4.2 for discussions on silicide formation. (b) Atomic structure of WSi2 crystal. 

At present, tungsten silicide is usually used on the top of gate polysilicon as polycide structure which is an abbreviated name for polysilicon-silicide as shown in Fig. 6. 

---