Three-component resists

Fig. 25. Cross-linking reactions in a three-component resist system. Both O-alkylation and C-alkylation are shown.

Three-component resist with a cross-linker... 

Figure 5.12. Three component resistances involved in Hennis-Tripodi s model. (Reproduced from [174] with permission)...

Figure 14. Dissolution rate of exposed (R) and unexposed (Rq) for three component resist of novolak (nov), % NOVOBOC (BOC), and photoacid generator (PAG).

The heat-transfer coefficient of most interest is that between the bed and a wall or tube. This heat-transfer coefficient, is made up of three components. To obtain the overall dense bed-to-boiling water heat-transfer coefficient, the additional resistances of the tube wall and inside-tube-waH-to-boiling-water must be added. Generally, the conductive heat transfer from particles to the surface, the convective heat transfer... 

It is convenient to distinguish three components of the overpotential, r. Two of these are associated respectively with mass-transfer restrictions in the electrolyte near the electrode (concentration overpotential, f/c), and with kinetic limitations of the reaction taking place at the electrode surface (surface overpotential, rjs) the third one is related to ohmic resistance. 

Three component, aqueous-base developable, positive-tone resists utilizing the chemical amplification principle have also recently been reported (81,82). In these systems, irradiation of a phenolic resin/inhibitor/acid generator resist generates an acid which upon mild heating, catalyzes either depolymerization or deblocking of a... 

Figure 3 Resistivity of a single crystal Bi-Sr-Ca-Cu-O. (a) Averaged a,b plane resistivity and the ratio of c to a,b plane resistivity vs temperature, (b) Three components of the resistivity tensor. Ref. 4.

This three-component copolymer (terpolymer) (EPDM) contains about 15 double bonds per 1000 carbon atoms in the polymer. This provides enough reactive sites for low-density cross-linking, but unlike Hevea rubber (polyi-soprene), which contains about 200 double bonds per 1000 carbon atoms, EPDM is resistant to ozone. EPDM is used for the sidewalls of tires and for rubber hose but develops too much heat during flexing to be used for heavy-duty tire treads. 

Several groups have investigated three-component systems encompassing both chemical amplification and dissolution inhibition. As stated earlier, Smith and Bonham (63) reported resist materials composed of a binder resin (novolac), a nonpolymeric compound containing acid-labile functional groups such as acetals, and a trihalomethyl-substituted 5-triazine acid photogenerator. The acid-labile compound acts as a novolac dissolution inhibitor in a manner analogous to the action of DNQ in conventional positive resists. However, in this case, the inhibitor is not photochemically active. Instead,... 

Other three-component systems based on this chemistry have made use of the following acid-labile dissolution inhibitors polyphthalaldehyde (80), ketals of (J-ketoesters (81), and compounds containing C-O-Si bonds (82). Similar resists have also been used with other radiation sources these will be discussed in subsequent sections. 

Both two-component (67) and three-component (127, 128) resists based... 

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