Targeting Features

Entry Author Target Features optimized Tools used Reference... 

The synthesis route of the primary particles possess two distinct points where one can influence the target features (Fig. 2). 

Useful Annotations of a Library of Specificity-Promoting Target Features... 

Resist contrasts are defined as the slopes of the linear portion of the sensitivity curves (Fig. 3) and depend on process conditions. Thus, the sensitivity (contrast) curves are constructed to semi-optimize process conditions for a given formulation. However, final optimization of a resist formulation and process conditions requires lithographic imaging of target features. A plot of a dissolution rate as a function of exposure dose (cf. Fig. 172) is very useful in assessing the developer selectivity (development contrast) as mentioned earlier. 

FIGURE 2. Part of a mass spectra made with the laser mass analyzer with the Pb isotopes of a soldering alloy target, featuring a mass resolution M/AM 600 (FWHM). 

Figure 9.9 PROLITH simulation of reflectivity of single-layer BARC (ARC 29A from Brewer Science) and dual-layer BARC, comprising a top layer (SHB) with n 1.63, k 0.13 and a bottom layer (ODL) with n 1.5, k 0.3, both from Shinetsu. Exposure wavelength 193 nm. Target feature 50-nm lines per space at 100 nm pitch. Numerical aperture of exposure tool 1.35. (Courtesy of Ryoung-han Kim.)...

All specification items and units then have a target feature structure that is used in the target function. In addition, units have a join feature structure, or more precisely, a left join feature structure and a right join feature structure, one for each side of the unit. These feature structures can be completely separate, but it is common for features to be shared (e.g. FO is often used in both the target and join feature structure). As with all the feature structures we consider, each is an instance drawn from a defined feature system, comprising defined features and their... 

The join feature issue is considerably more straightforward than with target features. Firstly, we have access to both linguistic features and the true acoustic features secondly as all units have had their features measured and derived in the same way, we don t have to worry about issues of comparing generated acoustic values with ones determined by signal processing. In addition to... 

MALDI is an alternative to ESI for an interface between microfluidic platforms and MS. The geometry of MALDI detection targets features arrays of crystallized sample spots on an open surface, and the process is (in general) performed under vacuum. Thus, MALDI is not an obvious match for interfacing with microfluidics despite this, several interfaces with microfluidics have recently been developed. 

Three variables control the achieved spatial resolution (1) the nature of the target features, the most important being size (2) the distance between the target and the sensing device and (3) some inherent properties of the sensor embodied in the term resolving power. 

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