SXPS soft X-ray photoelectron

SRPES synchrotron radiation photoelectron spectroscopy. For photon energies less than 300 eV also SXPS soft X-ray photoelectron spectroscopy. 

XPS is also often perfonned employing syncln-otron radiation as the excitation source [59]. This technique is sometimes called soft x-ray photoelectron spectroscopy (SXPS) to distinguish it from laboratory XPS. The use of syncluotron radiation has two major advantages (1) a much higher spectral resolution can be achieved and (2) the photon energy of the excitation can be adjusted which, in turn, allows for a particular electron kinetic energy to be selected. 

McFeely and co-workers used soft x-ray photoelectron spectroscopy (SXPS) to measure the changes in binding energies of Si(2p) levels after slight exposure to fluorine atoms via dissociative chemisoriDtion of XeF2 [39]. Using synclirotron radiation at 130 eV as the source enabled extreme surface sensitivity. Since this level is split into a... 

Soft X-Rav Photoelectron Spectroscopy. Typically, SXPS uses synchrotron radiation to tune the X-ray energy for maximum absorption by one element. The chemical shift Information available via this technique is exactly analogous to the chemical shifts discussed above. Examples using SXPS are Included in the examples below and are meant to indicate further how XPS can be used to solve problems in the microelectronics Industry. 

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