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Surfaces inorganic devices

J. B. Pallix, C. H. Becker, and K. T. Gillen, Appl. Surface Sck 32,1 (1988). An applications oriented discussion of using MPI-SALI for depth profiling, interface analysis in inorganic material systems. Examples of SALI depth profiles are given of a B implant in Si and the fluorine implanted electronic test device which was referenced in this encyclopedia article. [Pg.570]

See other pages where Surfaces inorganic devices is mentioned: [Pg.245]    [Pg.245]    [Pg.245]    [Pg.3377]    [Pg.1613]    [Pg.185]    [Pg.523]    [Pg.107]    [Pg.28]    [Pg.391]    [Pg.21]    [Pg.115]    [Pg.599]    [Pg.444]    [Pg.59]    [Pg.379]    [Pg.375]    [Pg.256]    [Pg.145]    [Pg.175]    [Pg.560]    [Pg.256]    [Pg.404]    [Pg.255]    [Pg.565]    [Pg.148]    [Pg.455]    [Pg.283]    [Pg.335]    [Pg.436]    [Pg.71]    [Pg.187]    [Pg.375]    [Pg.11]    [Pg.530]    [Pg.251]    [Pg.135]    [Pg.633]    [Pg.633]    [Pg.542]    [Pg.184]    [Pg.166]    [Pg.111]    [Pg.201]    [Pg.233]    [Pg.157]    [Pg.627]    [Pg.325]    [Pg.350]   
See also in sourсe #XX -- [ Pg.2 , Pg.121 ]



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Devices inorganic

Inorganic surfaces

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