Superconducting Metal Oxide SMO Lattice-Matched Insulators

4 Superconducting Metal Oxide (SMO) Lattice-Matched Insulators 

The CVD growth of MgO thin films on Si substrates employed ftw-cyclopentadienyl magnesium, Mg(Cp)2 (13) [133]. The growth orientation of the MgO was found to be temperature-dependent. Below 700°C, (lll)-oriented growth was observed, while above 800°C (lOO)-oriented growth was observed. 

The high dielectric properties and refractory nature of many nitrides make them attractive for chemical passivation. In this regard silicon nitride has become the standard within the semiconductor industry, both as an encapsulation layer and as an etch mask. 

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