Stober-and alkali-silicate sols

Figure 14.1 Effect of the salt concentration on the polishing rate left side (a) for Stober- and alkali-silicate sols and right side (b) for ftimed-siUca dispersions.

As can be seen in the particle-size measurements (cf. Figure 14.4) and cryo-TEM images (cf. Figure 14.5), the mean particle sizes for Stober- and alkali-silicate sols vary around 21 and 40 nm, respectively, independent of the pH value. The smaller particles of the Stober-sol show a narrow distribution. As shown in Figure 14.5, the fumed silica consists of aggregates built by flame fusion of smaller spherical primary particles. Their real size cannot be measured exactly by the dynamic light scattering method... 

Silica-based slurries are widely used not only to pohsh Si02 but also other materials, for example (poly)silicon and copper. As hsted and characterized in Section 14.2, the three main types of Si02 abrasive formulations commonly used are Stober- and alkali-silicate sol and fumed-silica dispersions (Choi et al., 2004a,b,c Estel et al., 2010). 

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See also in sourсe #XX -- [ , ]

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