Sticking probability, hydrogen/silicon

A sticking model is used for the plasma-wall interaction [137]. In this model each neutral particle has a certain surface reaction coefficient, which specifies the probability that the neutral reacts at the surface when hitting it. In case of a surface reaction two events may occur. The first event is sticking, which in the case of a silicon-containing neutral leads to deposition. The second event is recombination, in which the radical recombines with a hydrogen atom at the wall and is reflected back into the discharge. 

A. Matsuda, K. Nomoto, Y. Takeuchi, A. Suzuki, Y. Yuuki, J. Perrin Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphus silicon. Surf. Sci. 227, 50 (1990)... 

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