Standards for AES and XPS

Reference procedures (i.e., documentary standards) for sinface analysis have been published by ASTM International [8] and the ISO [9]. Tables 3.2.3.1 and 3.2.3.2 list selected standards prepared by ASTM International Committee E-42 on Surface Analysis and by ISO Technical Committee (TC) 201 on Surface Chemical Analysis that are relevant to AES and XPS. These standards provide recommended terminology and definitions, procedures for handling and mounting specimens. 

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E 827-08 Practice for identifying elements by the peaks in Auger electron spectroscopy 

E 983-10 Guide for minimizing unwanted electron beam effects in Auger electron 

E 984-06 Guide for identifying chemical effects and matrix effects in Auger electron 

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