SRIM code

According to the SRIM code (www.srim.org), lO cm Si ions introduced by the elastic energy losses about 130 displacements per atom (dpa), while Xe ions - less than 0.014 dpa. On the other hand, electronic energy losses of Si ions were -0.2 keV/nm, while for SHI they achieved 14keV/nm. Therefore, Si segregation and growth of the nanoprecipitates under Xe ion irradiation were mainly due to the electronic energy losses of SHI. 

Fig. 1. Depth distributions of implanted nitrogen per incident Isf ion calculated by SRIM code for 5 and 50 keVlSF implantations.

Figure 6.4 The penetration depth of He ions (i.e., modified layer thickness) in PDMS as a function of the energy (100-4000 keV range) calculated by SRIM code [44].

The advantage of the ion-beam-induced modification against the other mentioned methods is that the modified layer thickness and the level of oxidation can be easily controlled with the energy and the dose of the incident ions. Figure 6.4 shows the penetration depth of the He ions (i.e., modified layer thickness) in the PDMS as a function of the He energy, over a 100 - 4000 keV range, calculated by SRIM code [44]. 

J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985. Computer code available at http // www.srim.org. 

SRIM (Stopping and Range of Ions in Matter). As another example, ELOSS code was established at Japan Atomic Energy Research Institute (JAERI), and the detail is published by Hata and Baba [17]. 

Ziegler J F, Biersack J P, Littmerk U, Stopping Power and Ranges of Ion in Matter (SRIM) (Pergamon Press, New York), Ziegler J F, Ziegler M D, Biersack J P, Computer code SRIM, available from http //www. SRIM.org, 1985. 

Ziegler JF, Biersack JP and Littmark U (1985) in The Stopping and Ranges of Ions in Matter, Vol. I (Pergamon Press, New York) (TRIM computer code - www.srim.org/SRIM/TRIM/)... 

It should be added, that several programs have been developed to simulate the ion beam energy spectra, and these can be divided into either analytical (SIMNRA, RUMP, NDF) or Monte-Carlo (TRIM.SP, SRIM, SDTrimSP, MCERD CORTEO) codes [138]. 

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