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SQM Surface Quality Monitor , from ADE, USA

Laser beam reflectance-based bright channel technology (quad cell) [Pg.138]

AWIS-SQM It is viewed as a next-generation multifunchonal inspection tool can be used in a 200 mm or 300 mm wafer has multifunctional inspection capability and is mainly used in measurement of particle, haze, and nanotopography. [Pg.138]

SQMTM Technology Bright Field Quad Cell [Pg.138]


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