Soft lithographic process

With time, the microbial chip fabrication procedures have evolved enabling SECM studies of increasingly complex biological processes. Nagamine et al. reported an on-chip transformation of E. coli cells. Their technique was based on soft lithographic processes, which were... 

Several multiple cell SECM studies have focused on the preferential patterning of cells on a transparent solid support prior to SECM studies. The coUagen-gel-imbedded ceU matrix discussed at length in other sections has been applied to multiple human ceU studies. The use of poly(dimethylsiloxane) soft lithographic processes has also been used because they easily facilitate the acquisition of statistically valid SECM measurements and local delivery of a variety of solutes to the cells. " Finally, the use of the microelectrode as a lithographic pencil capable of writing patterns preferentially adhering one cell over another has also been reported. 

Solvent-Developed Photosensitive Materials. Many of the limitations of the bilayer polyamic acid process have been overcome through the use of photosensitive polyimides (9). Formulated photosensitive products have been developed that result in improved process capability resulting in increased pattern resolution, improved soft bake time and temperature process latitude, and improved lithographic process latitude and throughput while maintaining desired film physical properties. Moreover, the film patterning process requires fewer steps... 

Popular microfabrication methods include lithographic, galvanoformung, abformtechnik (LIGA), wet and dry etching processes, micromachining, lamination, and soft lithography. An overview of these techniques is given here and specifics can be found in the references. 

Soft lithography includes a collection of lithographic methods in which a soft mold or template is used to create patterned structures in the subjeeted materials. These methods offer attractive solutions for producing well-ordered CP nanowires. For example, Beh et al have developed a micromolding in capillaries (MIMIC) process in which a poly(dimethylsiloxane) (PDMS) mold with embedded ehannels can be used for the... 

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