Slurry Filtration Methodology

FIGURE 18.12 Effect of multiple layer depth media on filter cutoff behavior and schematic arrangement in a POU filter design. 

In the submicron range of particle sizes, there are at least two media types to consider depth and microporous membrane. Typically, depth media is melt-blown fibrous nonwoven type (Fig. 18.13). Membranes are basically cast or expanded microporous films. Depth filters with a wrapped or pleated construction are used for slurry filtration (see Fig. 18.14a and b). Membrane 

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FIGURE 18.13 Typical graded-density depth media for CMP slurry filtration. 

FIGURE 18.14 Typical depth filter housing arrangement and a pleated depth filter configuration. 

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