Slurry dispenser

Slurry dispense system suppliers Dispense engine... 

Pressure and flow budget from slurry dispense machine... 

Redundant piping system. Redundant piping systems can be installed, especially in conjunction with dual daytanks, to enable a complete cleanout of the delivery system between slurry batches. When this degree of redundancy is chosen, a totally separate slurry dispense machine is included to permit a backup for all major components. 

Redundant dispense engines. Redundant dispense engines have become fairly common in both pump- and non-pump-based slurry dispense systems. Since slurry is both chemically and mechanically aggressive, a backup dispense engine enables system maintenance without interruption of supply to the fab. 

Storage tanks, or daytanks, are used to hold a supply of slurry for circulation to a fab via a global delivery loop. Since slurry must be kept moving, rather than delivered in a deadhead delivery fashion, a slurry dispense engine will typically draw from a storage tank and circulate the slurry back to that storage tank, as depicted in Fig. 6. 

As discussed in earlier sections, CMP process involves the surfaces to be polished, pads,slurries which are composed of chemicals, abrasives, and fluids, slurry dispensing tools, CMP tools, cleaning tools, and finally metrology tools to measure the thickness and quality of the processed (or unprocessed) surfaces of films. Figure 1.1 shows a diagram of CMP process integration. Final manufacturability of a given CMP process will be determined by the need, performance, and cost per die. 

Equilibrate the Melon Gel IgG Purification Support and Purification Buffer to room temperature (about 30 min) and swirl the bottle containing the Purification Support (do not vortex) to obtain an even suspension. To ensure proper gel slurry dispensing, use a wide bore or cut pipette tip to dispense 500 pi of gel slurry into a Handee Mini-Spin Column placed in a microcentrifuge tube. Swirl the bottle of gel slurry before pipetting each sample to maintain an even gel suspension. 

A lapping system equipped with a 15 in. copper lap plate and an electronically controlled diamond slurry dispenser was used in this research. A 3 xm diamond slurry was employed, which produced higher and more stable material removal rate than a 1 pm diamond slurry. The slurry was applied at a rate of 3 sec of spray every 30 sec. The lapping pressure on each ceramic test bar was 35,700 Pa. A sample carrier accommodated five test bars arranged aroimd the outer perimeter of the carrier. 

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