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Silicon oxide deposition, surface imaging resists

Besides using the resists to etch copper boards, metal parts, or silicon surfaces, new applications have been disclosed. Spatial images have been holographically recorded in resists.— The resist systems of siloxanes can be converted after imaging by oxidation into passivated glass for direct formation of insulated circuits.— The resist can be filled with glass 9 or metals— and fired to form circuits directly. In one application, the resists are filled with electroless plating sensitizer for deposition of... [Pg.127]


See other pages where Silicon oxide deposition, surface imaging resists is mentioned: [Pg.217]    [Pg.334]    [Pg.143]    [Pg.923]    [Pg.344]    [Pg.1200]    [Pg.21]    [Pg.947]    [Pg.121]    [Pg.472]    [Pg.55]   
See also in sourсe #XX -- [ Pg.188 , Pg.189 , Pg.190 ]




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Deposition surface

Image resist

Imaging surfaces

Oxidation resistance

Oxidation silicon surface

Oxidation silicones

Oxides silicon oxide

Oxidized silicon

Resist deposition

Resist imaging

Resist imaging images

Silicon oxidation

Silicon oxides

Silicon surface

Surface image

Surface resistance

Surface resistivity

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