Silicon oxide deposition, surface imaging resists

Besides using the resists to etch copper boards, metal parts, or silicon surfaces, new applications have been disclosed. Spatial images have been holographically recorded in resists.— The resist systems of siloxanes can be converted after imaging by oxidation into passivated glass for direct formation of insulated circuits.— The resist can be filled with glass 9 or metals— and fired to form circuits directly. In one application, the resists are filled with electroless plating sensitizer for deposition of... 

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