Sensor Properties at Elevated Temperatures, Influence of Hydrogen

4 Sensor Properties at Elevated Temperatures, Influence of Hydrogen 

High-temperature operation, 500°C, causes distinctive phenomena to occur in the case of hydrogen gas. At these elevated temperatures, atomic hydrogen easily diffuses through most materials, even diamond [102], It can he expected that all wide band- gap devices operated at elevated temperatures are affected hy hydrogen. 

In silicon devices, which are operated at temperatures below 200°C, hydrogen annealing at 450°C is used to passivate surface states at the oxide-semiconductor interface. Hydrogen forms electrically inactive complexes with the surface states. 

In Section 2.4.1, we discuss the reversible influence of hydrogen on SiC-based capacitors and Schottky diodes when operated at elevated temperature. 

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